High tech enterprise integrating R&D, manufacturing, marketing and service of ultrasonic cleaning equipment, automatic non-standard cleaning equipment, etc
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Dongguan Rihe Automation Equipment Co., Ltd
Tel：86-0769 22460901
Mobile Phone：13929221177
Add：Building 28, Huake City Innovation Island Industrial Incubation Park, No. 2, Wanlu Road, Daojiao Town, Dongguan City, Guangdong Province
Add：Bldg 28,HuaKeCheng,Wan Dao Road No.2, DaoJiao Town, DongGuan, China
Product Details
Liquid Medicine Etching Cleaning Machine
Liquid medicine etching cleaning machine, Scrub cleaning equipment, liquid medicine (hydrofluoric acid) cleaning equipment
Category:
Cleaning Machine
Product Description
Equipment Overview: Immersion Wet Etching Machine Product: 6-inch Wafer&wafer Box.
Function: Horizontally Shake The Wafer In The Liquid Medicine To Etch The Wafer Surface.
1st Tank: Etching Tank Using Ferric Chloride. The Liquid Temperature Is 50 ± 0.3 ℃. Horizontal Swing Period 2.0 ± 0.2 Seconds
Etching Time Timer Control
The Average Etching Rate Is 23a/sec. (sigma 1a)
Pattern Line Width Deviation After Etching ± 4um
(line Width 30~170um)
The Second Tank: The First Flushing Tank Of Pure Water Qdr.
The Third And Fourth Tanks: The Second Flushing Tank For Pure Water Overflow.
Features: The Manual Etching Process Developed By The Customer Is Faithfully Reproduced Through The Automaton. (the Customer Has Applied For A Patent)
key word:
Liquid Medicine Etching Cleaning Machine
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Building 28, Huake City Innovation Island Industrial Incubation Park, No. 2, Wanlu Road, Daojiao Town, Dongguan City
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